Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions
Stephen M. Rossnagel, William D. Westwood, Jerome J. Haber
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Catégories:
Année:
1990
Editeur::
Noyes Publications
Langue:
english
Pages:
535
ISBN 10:
0815517637
ISBN 13:
9780815517634
Collection:
Materials science and process technology series
Fichier:
DJVU, 4.98 MB
IPFS:
,
english, 1990