Extreme Ultraviolet Lithography

Main
Engineering - Electrical & Electronic Engineering
Extreme Ultraviolet Lithography

Extreme Ultraviolet Lithography

Name: Extreme Ultraviolet Lithography
ISBN: 9781510639393

Harry J. Levinson

0 / 0

0 comments

Avez-vous aimé ce livre?

Quelle est la qualité du fichier téléchargé?

Veuillez télécharger le livre pour apprécier sa qualité

Quelle est la qualité des fichiers téléchargés?

This book covers the many aspects of lithographic technology that needed to be addressed in order to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced the areas of technical focus, are discussed. Potential improvements to current EUV technology and extensions to future nodes are also covered. Each topic is approached from the perspective of a practicing lithographer in a wafer fab, in either manufacturing or development, and there are many references at the end of each chapter.

Catégories:

Engineering - Electrical & Electronic Engineering

Année:

2020

Editeur::

SPIE

Langue:

english

Pages:

245

ISBN 10:

151063939X